Phase formation in the Ti–Al–Mo–N system during the growth of adaptive wear-resistant coatings by arc PVD
Ti–Al–Mo–N coatings have been grown by arc PVD at different bias voltages, V b , applied to the substrate and partial pressures of nitrogen reaction gas, p (N 2 ), in the working chamber. The coatings have a nanocrystalline structure, with an average grain size on the order of 30–40 nm and a layered...
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Published in | Inorganic materials Vol. 52; no. 7; pp. 735 - 742 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
Moscow
Pleiades Publishing
01.07.2016
|
Subjects | |
Online Access | Get full text |
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Summary: | Ti–Al–Mo–N coatings have been grown by arc PVD at different bias voltages,
V
b
, applied to the substrate and partial pressures of nitrogen reaction gas,
p
(N
2
), in the working chamber. The coatings have a nanocrystalline structure, with an average grain size on the order of 30–40 nm and a layered architecture made up of alternating layers based on a (Ti,Al)N nitride and Mo-containing phases of thickness comparable to the grain size. It has been shown that the phase composition of the coatings depends on
V
b
and
p
(N
2
): raising the energy of deposited ions by increasing
V
b
from–120 to–140 V, as well as raising
p
(N
2
) from 0.3 to 0.5 Pa, leads to a more complete molybdenum nitride formation during coating growth, which causes a transition from (Ti,Al)N–Mo–Mo
2
N compositions to (Ti,Al)N–Mo
2
N. Measurements of the binding energy of Mo 3
d
photoelectrons in metallic Mo and the Mo
2
N nitride by X-ray photoelectron spectroscopy have shown that the transition from the former phase to the latter is accompanied by a negligible energy shift. |
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Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISSN: | 0020-1685 1608-3172 |
DOI: | 10.1134/S002016851607013X |