Geometric effects on thermoelastic damping in MEMS resonators
The effects of geometry on the energy dissipation induced by thermoelastic damping in MEMS resonators are investigated numerically using a finite element formulation. The perturbation analysis is applied to derive a linear eigenvalue equation for the exponentially decaying rate of the mechanical osc...
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Published in | Journal of sound and vibration Vol. 309; no. 3; pp. 588 - 599 |
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Main Author | |
Format | Journal Article |
Language | English |
Published |
London
Elsevier Ltd
22.01.2008
Elsevier |
Subjects | |
Online Access | Get full text |
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Summary: | The effects of geometry on the energy dissipation induced by thermoelastic damping in MEMS resonators are investigated numerically using a finite element formulation. The perturbation analysis is applied to derive a linear eigenvalue equation for the exponentially decaying rate of the mechanical oscillation. The analysis also involves a Fourier method that reduces the dimensionality of the problem and considerably improves the computational efficiency. The method is first validated by comparing the two-dimensional model to the existing analytical solutions for a simply supported beam system, and then it is extended to a three-dimensional axisymmetric geometry to obtain the energy loss as a function of the geometric parameters in a silicon ring resonator. The computational results reveal that there is a peak value for the resonant frequency when the radial width of the ring varies. In addition, the quality factor (
Q-factor) decreases with the radial width as a monotonic function. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0022-460X 1095-8568 |
DOI: | 10.1016/j.jsv.2007.07.055 |