Influence of Discharge Plasma Inhomogeneities on the Characteristics of KrF-Laser Radiation
Results of studies of the electric-discharge KrF laser with a specific pulse energy of ~6 J/L and an internal energy efficiency of more than 4% are presented. The formation of instabilities of various types in the volume discharge from an initial inhomogeneity of the electric field in the discharge...
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Published in | Russian physics journal Vol. 63; no. 12; pp. 2070 - 2075 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
New York
Springer US
01.04.2021
Springer Springer Nature B.V |
Subjects | |
Online Access | Get full text |
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Summary: | Results of studies of the electric-discharge KrF laser with a specific pulse energy of ~6 J/L and an internal energy efficiency of more than 4% are presented. The formation of instabilities of various types in the volume discharge from an initial inhomogeneity of the electric field in the discharge gap and the partial composition of the gas mixture are shown. The possibility of stable discharge burning during several half-periods of the pump current is demonstrated. |
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ISSN: | 1064-8887 1573-9228 |
DOI: | 10.1007/s11182-021-02276-8 |