Influence of Discharge Plasma Inhomogeneities on the Characteristics of KrF-Laser Radiation

Results of studies of the electric-discharge KrF laser with a specific pulse energy of ~6 J/L and an internal energy efficiency of more than 4% are presented. The formation of instabilities of various types in the volume discharge from an initial inhomogeneity of the electric field in the discharge...

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Bibliographic Details
Published inRussian physics journal Vol. 63; no. 12; pp. 2070 - 2075
Main Authors Li, Hongda, Panchenko, Y. N., Andreev, M. V., Puchikin, A. V., Yampolskaya, S. A., Losev, V. F., Anufrick, S. S.
Format Journal Article
LanguageEnglish
Published New York Springer US 01.04.2021
Springer
Springer Nature B.V
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Summary:Results of studies of the electric-discharge KrF laser with a specific pulse energy of ~6 J/L and an internal energy efficiency of more than 4% are presented. The formation of instabilities of various types in the volume discharge from an initial inhomogeneity of the electric field in the discharge gap and the partial composition of the gas mixture are shown. The possibility of stable discharge burning during several half-periods of the pump current is demonstrated.
ISSN:1064-8887
1573-9228
DOI:10.1007/s11182-021-02276-8