A novel MOEMS based adaptive optics for X-ray focusing

This work presents the design and microfabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a p...

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Bibliographic Details
Published inMicroelectronic engineering Vol. 83; no. 4; pp. 1321 - 1325
Main Authors Al Aioubi, M.Y., Prewett, P.D., Huq, S.E., Djakov, V., Michette, A.G.
Format Journal Article Conference Proceeding
LanguageEnglish
Published Amsterdam Elsevier B.V 01.04.2006
Elsevier Science
Subjects
Adaptive optics
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
MOEMS
MOXI
Novel X-ray optics
Optoelectronic devices
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Adaptive optics
MOEMS
Novel X-ray optics
MOXI
Microoptoelectromechanical device
Microprobe
Microelectronic fabrication
Focal length
X-ray optics
Optical elements
Micromachine
Microoptics
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Summary:This work presents the design and microfabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and for system calibration.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2006.01.107