A novel MOEMS based adaptive optics for X-ray focusing
This work presents the design and microfabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a p...
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Published in | Microelectronic engineering Vol. 83; no. 4; pp. 1321 - 1325 |
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Main Authors | , , , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
Amsterdam
Elsevier B.V
01.04.2006
Elsevier Science |
Subjects | |
Online Access | Get full text |
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Summary: | This work presents the design and microfabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and for system calibration. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/j.mee.2006.01.107 |