Design and fabrication of active and passive photonic crystal resonators

• Published in: Microelectronic engineering Vol. 83; no. 4; pp. 1823 - 1825
• Main Authors: Stomeo, T., Errico, V., Salhi, A., Passaseo, A., Cingolani, R., D’Orazio, A., Sario, M. De, Marrocco, V., Petruzzelli, V., Prudenzano, F., Vittorio, M. De
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 01.04.2006; Elsevier Science
• Subjects: Applied sciences; Circuit properties; Circular geometry; Computers, microcomputers; Electric, optical and optoelectronic circuits; Electronic equipment and fabrication. Passive components, printed wiring boards, connectics; Electronics; Exact sciences and technology; FDTD method; Hardware; Integrated optics. Optical fibers and wave guides; Materials; Microcavity; Optical and optoelectronic circuits; Photonic crystals; Splitter; Circular geometry; Splitter; Microcavity; Photonic crystals; FDTD method; Passive component; Spectral response; Waveguide resonator; Quantum dot; Personal computer; Finite difference time-domain analysis; Two dimensional model; Numerical method; Planar waveguide; Photonic crystal; Active component; Embedded transducer; Circular configuration; Computer codes; Nanotechnology
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2006.01.211

We present the design and fabrication of active and passive two-dimensional photonic crystal (2D-PC) devices based on GaAs/AlGaAs slab waveguide nano-resonators. The active device is a vertical microcavity exploiting a 2D-PC of air holes arranged in a circular lattice configuration in a GaAs/AlGaAs slab waveguide. The active medium embedded in the waveguide is composed of InAs/GaAs quantum dots emitting around 1300 nm. The investigated passive device is a dual wavelength division splitter exploiting 2D-PC resonators. The spectral response of the active circular microcavity and the transmission characteristics at the different ports of the dual wavelength splitter have been evaluated by a finite-difference time-domain method based computer code. A detailed description of the nanotechnology processes necessary for the fabrication of both active and passive 2D-PC devices is also reported.