Solid-Phase Complex Compounds and Composites of Metal Oxides, Fluorides, and Chalcogenides as Materials for Interference Coatings: A Review
The development of composition optimization methods of oxide, fluoride, and chalcogenide materials for interference coatings using the valence state of metal in complex compounds and composites is considered. It is shown that the electronegativity of elements plays an important role in the formation...
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Published in | Theoretical and experimental chemistry Vol. 57; no. 4; pp. 262 - 271 |
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Main Author | |
Format | Journal Article |
Language | English |
Published |
New York
Springer US
01.09.2021
Springer Springer Nature B.V |
Subjects | |
Online Access | Get full text |
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Summary: | The development of composition optimization methods of oxide, fluoride, and chalcogenide materials for interference coatings using the valence state of metal in complex compounds and composites is considered. It is shown that the electronegativity of elements plays an important role in the formation of substances of a certain composition in such systems. An explanation of CVD (chemical vapor deposition) used in film formation based on metal (oxide) chalcogenide–germanium composites is offered. |
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ISSN: | 0040-5760 1573-935X |
DOI: | 10.1007/s11237-021-09694-2 |