A low-loss V-groove coplanar waveguide on an SOI substrate
A novel low-loss 50-Ω coplanar waveguide with V-groove on an SOI substrate is proposed.Through a CMOS-compatible process and anisotropic etching of silicon, surface silicon is removed from the SOI.The measured results show that the V-groove coplanar waveguide causes about 50% less loss than the conv...
Saved in:
| Published in | Journal of semiconductors Vol. 30; no. 7; pp. 51 - 53 |
|---|---|
| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
IOP Publishing
01.07.2009
|
| Subjects | |
| Online Access | Get full text |
| ISSN | 1674-4926 |
| DOI | 10.1088/1674-4926/30/7/074004 |
Cover
| Abstract | A novel low-loss 50-Ω coplanar waveguide with V-groove on an SOI substrate is proposed.Through a CMOS-compatible process and anisotropic etching of silicon, surface silicon is removed from the SOI.The measured results show that the V-groove coplanar waveguide causes about 50% less loss than the conventional one at a high frequency of up to 40 GHz. |
|---|---|
| AbstractList | A novel low-loss 50-Ω coplanar waveguide with V-groove on an SOI substrate is proposed.Through a CMOS-compatible process and anisotropic etching of silicon, surface silicon is removed from the SOI.The measured results show that the V-groove coplanar waveguide causes about 50% less loss than the conventional one at a high frequency of up to 40 GHz. |
| Author | 赵宇航 童家榕 曾璇 王勇 |
| AuthorAffiliation | State Key Laboratory of ASIC ＆ System, Microelectronics Department, Fudan University, Shanghai 201203, China Shanghai IC Research and Development Center, Shanghai 201203, China |
| Author_xml | – sequence: 1 fullname: 赵宇航 童家榕 曾璇 王勇 |
| BookMark | eNqNkEtLw0AUhWdRwVr7E4TBtTF3HkkmuirFR6HQhY_tMElm4mCciZm0xX9vSosLKejqwj3nu5xzz9DIeacRuiBwTUCImKQZj3hO05hBnMWQcQA-QuOf_SmahmALgFwINohjdDPDjd9GjQ8Bv0Z15_1G49K3jXKqw1u10fXaVhp7h5XDT6sFDusi9J3q9Tk6MaoJenqYE_Ryf_c8f4yWq4fFfLaMSpaIPiJZpbRmmhMmaEmYSmlhEsMF1STJM1BGQMV1TstEiIqkoBIGhgNXg0g1ZRN0u79bdkPKThtZ2l711rshhm0kAblrL3ct5a6lZCAzuW8_0Mkvuu3sh-q-_uRgz1nf_hu5OoIcs8q2MoP98pDszbv607paFqp8N7bRkhEYfpMS9g1TSYbX |
| CitedBy_id | crossref_primary_10_1109_TMAG_2011_2148193 crossref_primary_10_1038_s41598_021_03540_0 |
| Cites_doi | 10.1109/4.661204 10.1109/TED.2008.923564 10.1016/j.sse.2006.10.008 |
| ContentType | Journal Article |
| DBID | 2RA 92L CQIGP W92 ~WA AAYXX CITATION |
| DOI | 10.1088/1674-4926/30/7/074004 |
| DatabaseName | 维普期刊资源整合服务平台 中文科技期刊数据库-CALIS站点 中文科技期刊数据库-7.0平台 中文科技期刊数据库-工程技术 中文科技期刊数据库- 镜像站点 CrossRef |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering Physics |
| DocumentTitleAlternate | A low-loss V-groove coplanar waveguide on an SOI substrate |
| EndPage | 53 |
| ExternalDocumentID | 10_1088_1674_4926_30_7_074004 31059761 |
| GroupedDBID | 02O 042 1WK 2B. 2C0 2RA 4.4 5B3 5VR 5VS 7.M 92H 92I 92L 92R 93N AAGCD AAJIO AALHV AATNI ABHWH ACAFW ACGFO ACGFS ACHIP AEFHF AFUIB AFYNE AHSEE AKPSB ALMA_UNASSIGNED_HOLDINGS ASPBG AVWKF AZFZN BBWZM CCEZO CDYEO CEBXE CHBEP CJUJL CQIGP CRLBU CUBFJ CW9 EBS EDWGO EJD EQZZN FA0 IJHAN IOP IZVLO JCGBZ KNG KOT M45 N5L NS0 NT- NT. PJBAE Q02 RIN RNS ROL RPA RW3 SY9 TCJ TGT W28 W92 ~WA UNR -SI -S~ 5XA 5XJ AAYXX ACARI AERVB AGQPQ AOAED ARNYC CAJEI CITATION Q-- TGMPQ U1G U5S |
| ID | FETCH-LOGICAL-c358t-17daee3e41382c13a62bf5f482e15970af80d4e92c588d160a530f404a9702e23 |
| IEDL.DBID | IOP |
| ISSN | 1674-4926 |
| IngestDate | Thu Apr 24 22:54:17 EDT 2025 Tue Jul 01 03:20:24 EDT 2025 Tue Nov 10 14:18:39 EST 2020 Mon May 13 16:04:15 EDT 2019 Thu Nov 24 20:32:14 EST 2022 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 7 |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c358t-17daee3e41382c13a62bf5f482e15970af80d4e92c588d160a530f404a9702e23 |
| Notes | SOI; coplanar waveguide; low loss; radio frequency coplanar waveguide radio frequency TN814 low loss TN4 SOI 11-5781/TN |
| PageCount | 3 |
| ParticipantIDs | crossref_primary_10_1088_1674_4926_30_7_074004 crossref_citationtrail_10_1088_1674_4926_30_7_074004 iop_primary_10_1088_1674_4926_30_7_074004 chongqing_backfile_31059761 |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | 2009-07-01 |
| PublicationDateYYYYMMDD | 2009-07-01 |
| PublicationDate_xml | – month: 07 year: 2009 text: 2009-07-01 day: 01 |
| PublicationDecade | 2000 |
| PublicationTitle | Journal of semiconductors |
| PublicationTitleAlternate | Chinese Journal of Semiconductors |
| PublicationYear | 2009 |
| Publisher | IOP Publishing |
| Publisher_xml | – name: IOP Publishing |
| References | 2 Gianesello F (5) 2006 3 Gianesello F (8) 2007 Siligaris A (10) 2008 Kim J (6) 2003 Wu Y H (1) 2000; 21 9 Hasani F (4) 2008 Kim J (7) 2003 |
| References_xml | – ident: 2 doi: 10.1109/4.661204 – volume: 21 start-page: 394 issn: 0741-3106 year: 2000 ident: 1 publication-title: IEEE Electron Device Lett – ident: 3 doi: 10.1109/TED.2008.923564 – start-page: 591 year: 2003 ident: 6 – start-page: 29 year: 2003 ident: 7 publication-title: Symposium VLSI Circuits – year: 2008 ident: 4 – start-page: 119 year: 2007 ident: 8 – start-page: 4 year: 2006 ident: 5 – ident: 9 doi: 10.1016/j.sse.2006.10.008 – start-page: 17 year: 2008 ident: 10 |
| SSID | ssib009883400 ssib004869572 ssj0067441 ssib016971655 ssib022315920 ssib004377404 ssib017478542 |
| Score | 1.7511843 |
| Snippet | A novel low-loss 50-Ω coplanar waveguide with V-groove on an SOI substrate is proposed.Through a CMOS-compatible process and anisotropic etching of silicon,... |
| SourceID | crossref iop chongqing |
| SourceType | Enrichment Source Index Database Publisher |
| StartPage | 51 |
| SubjectTerms | CMOS兼容 GHz SOI衬底 V型槽 低损耗 共面波导 各向异性刻蚀 硅表面 |
| Title | A low-loss V-groove coplanar waveguide on an SOI substrate |
| URI | http://lib.cqvip.com/qk/94689X/20097/31059761.html http://iopscience.iop.org/1674-4926/30/7/074004 |
| Volume | 30 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV3dS8MwED-mIOiD3-L8Ig_64EO3tEnb1DcRxxR0gh_4FrI0mcPRTt0U_Ou9tOtQFNS3Qu_S9u7I78pdfgewr4VNNbraQ3CMPJ7G3FOBRYdomyqbUJMUswguLqP2LT-_D-9rUE2m6-fDyc7fwMuykh-hvqO1azLajJsIeSX_J2K_i-izzlW186JgMalyqlGd2MGfvB9XcXwKD3nWe0KU-IJLM_jwTzDTWoKr6rBO2V3y2BiPug39_p278a9fsAyLk5STHJcxsgI1k63CwiciwlWYKxpB9csaHB2TQf7mDfAdyZ3Xw7z61RCdDwcqU8_kTb2a3rifGpJnRGXkunNGXnDrKShu1-G2dXpz0vYm8xU8zUIxQvekyhhmuOMh1D5TUdC1oeUiMJjkxFRZQVOO3tKhEKkfURUyajnlCm8GJmAbMJvlmdkEIqxQsR-o0GI6GbNY6YRrJaLEJMLXAa3D9tTSiM_60bFOSeaSuzjy68Ar20s9oSZ3EzIGsiiRCyGdCaUzoWRUxrI0YR0aU7Vhyc3xm8Ih-uSvsgdfZH-SkcPUbv1jzW2YL4tRrtt3B2ZHz2OziznNqLtXBPIH2Dni4A |
| linkProvider | IOP Publishing |
| linkToPdf | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV1LT9wwEB4BFagcaHlUXV71gR44ZOPETuJwQ8CKbXlJLYib5XXsbbWrZAu7IPHrGSfZFSAqQNwiZcZy5ovmG8njbwC2tLCZRqg9JMfY41nCPRVaBETbTNmUmrScRXB8Eh-e8x-X0eUU7E_uwhSDOvU38bESCq5CWDfECd_1zXtO585n1E985EAE2h9kdho-RCxO3RyD9unZOB-jdTm_cuI2vsfzv6WcysKfIu_-Q-54xFbTuKMH5NP6BGa87arnpNccDTtNffdE0fG93_UZFurqlOxWPoswZfIlmH-gWbgEs2XPqL5ehp1d0i9uvT5unFx4XSzBbwzRxaCvcnVFbtWN6Y7-ZoYUOVE5-XXaJteYpUo13BU4bx383jv06lEMnmaRGCKSmTKGGe4kC3XAVBx2bGS5CA3WQwlVVtCMI7A6EiILYqoiRi2nXOHL0ITsC8zkRW6-AhFWqCQIVWSx8kxYonTKtRJxalIR6JA2YG0SfqRy3XMCVZK5OjCJgwbwMSBS1yrmbphGX5an6UJIF0bpwigZlYmswtiA5sRtUMl4vOSwjTi91vb7I9vnbCTiuPqGNb_B3Nl-Sx61T36uwcfqCMv1CK_DzPBqZDawEhp2Nssf_R4rvvLO |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=A+low-loss+V-groove+coplanar+waveguide+on+an+SOI+substrate&rft.jtitle=Journal+of+semiconductors&rft.au=%E8%B5%B5%E5%AE%87%E8%88%AA+%E7%AB%A5%E5%AE%B6%E6%A6%95+%E6%9B%BE%E7%92%87+%E7%8E%8B%E5%8B%87&rft.date=2009-07-01&rft.issn=1674-4926&rft.issue=7&rft.spage=51&rft.epage=53&rft_id=info:doi/10.1088%2F1674-4926%2F30%2F7%2F074004&rft.externalDocID=31059761 |
| thumbnail_s | http://utb.summon.serialssolutions.com/2.0.0/image/custom?url=http%3A%2F%2Fimage.cqvip.com%2Fvip1000%2Fqk%2F94689X%2F94689X.jpg |