Characterisation of AlGaN MSM by Light Beam Induced Current technique
The influence of the grain structure on the performance of AlGaN MSM detector structures was examined by Light Beam Induced Current (LBIC) technique. LBIC is a mapping technique in which the generated photocurrent is measured for each position of the scanning light beam. Estimated values for the eff...
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Published in | Physica status solidi. C Vol. 3; no. 3; pp. 602 - 606 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
Berlin
WILEY-VCH Verlag
01.03.2006
WILEY‐VCH Verlag |
Subjects | |
Online Access | Get full text |
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Summary: | The influence of the grain structure on the performance of AlGaN MSM detector structures was examined by Light Beam Induced Current (LBIC) technique. LBIC is a mapping technique in which the generated photocurrent is measured for each position of the scanning light beam. Estimated values for the effective carrier collection regions between contact electrodes in AlGaN MSM structures are hundreds of nanometers. A non‐uniformity of the carrier distribution was observed. Regions, where the measured signal was one order of magnitude larger than the average signal level, were also observed. LBIC method was applied for investigation of layer quality and for optimisation of MSM detectors. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) |
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Bibliography: | istex:6E119EA6B82069F130ACE699DC27967EEDC3CDE1 ark:/67375/WNG-3X1RFKWC-8 ArticleID:PSSC200564147 ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 1862-6351 1610-1634 1610-1642 |
DOI: | 10.1002/pssc.200564147 |