Polymer-Reinforced, Aligned Multiwalled Carbon Nanotube Composites for Microelectromechanical Systems Applications

Aligned multiwalled carbon nanotube (MWNT)–polymer composites are synthesized for use in microelectromechanical systems (MEMS) applications. Indentation and bending tests reveal that the elastic modulus of the MWNT–MEMS devices is promoted by a factor of 20. Dynamic bending experiments show that MWN...

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Published inAdvanced materials (Weinheim) Vol. 17; no. 24; pp. 2987 - 2992
Main Authors Fang, W., Chu, H.-Y., Hsu, W.-K., Cheng, T.-W., Tai, N.-H.
Format Journal Article
LanguageEnglish
Published Weinheim WILEY-VCH Verlag 16.12.2005
WILEY‐VCH Verlag
Subjects
Carbon nanotubes
Carbon nanotubes, multiwalled
Microfabrication
Microstructures
multiwalled
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Summary:Aligned multiwalled carbon nanotube (MWNT)–polymer composites are synthesized for use in microelectromechanical systems (MEMS) applications. Indentation and bending tests reveal that the elastic modulus of the MWNT–MEMS devices is promoted by a factor of 20. Dynamic bending experiments show that MWNT–MEMS devices can be driven at a lower pull‐in voltage compared with classical devices. Complex and delicate MWNT–MEMS devices can also be fabricated (see Figure).
Bibliography:istex:2FF98CBB118E76AB497F384E22B32E88ED327D2E
ark:/67375/WNG-MZ057V7D-Z
This work was supported by the National Science Council of Taiwan (NSC-93-2218-E-007-012, NSC-93-2113-M-007-028).
ArticleID:ADMA200501305
This work was supported by the National Science Council of Taiwan (NSC‐93‐2218‐E‐007‐012, NSC‐93‐2113‐M‐007‐028).
ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
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ISSN:0935-9648
1521-4095
DOI:10.1002/adma.200501305