Growth of non-polar a-plane III-nitride thin films on Si(100) using non-polar plane buffer layer
A non‐polar $ (11 \overline {2}0) $ GaN thin film has been grown on Si(100) substrate for the first time with inserting a non‐polar plane AlN/MnS buffer layer using two growth techniques; metalorganic chemical vapor deposition (MOCVD) and pulsed laser deposition (PLD). An a‐plane GaN film is not acc...
Saved in:
Published in | Physica status solidi. C no. 7; pp. 2520 - 2524 |
---|---|
Main Authors | , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Berlin
WILEY-VCH Verlag
01.12.2003
WILEY‐VCH Verlag |
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | A non‐polar $ (11 \overline {2}0) $ GaN thin film has been grown on Si(100) substrate for the first time with inserting a non‐polar plane AlN/MnS buffer layer using two growth techniques; metalorganic chemical vapor deposition (MOCVD) and pulsed laser deposition (PLD). An a‐plane GaN film is not accompanied with the polarization problem along the c‐axis growth direction. By cathodoluminescence measurements, the band‐edge emission from the GaN film prepared by MOCVD was obtained at 370.4 nm (= 3.347 eV) at room temperature. A broad yellow luminescence emission related to deep level was also observed. (© 2003 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) |
---|---|
Bibliography: | ark:/67375/WNG-P2GRFR28-G istex:A7BE29BADF22023EA02ABC65EB9CF91C7C0BCB84 ArticleID:PSSC200303444 Also at: Combinatorial Materials Exploration and Technology, National Institute for Materials Science (COMET‐NIMS) ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 1610-1634 1610-1642 |
DOI: | 10.1002/pssc.200303444 |