A Six-Axis MEMS Force-Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution

• Published in: Journal of microelectromechanical systems Vol. 18; no. 2; pp. 433 - 441
• Main Authors: Beyeler, F., Muntwyler, S., Nelson, B.J.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.04.2009; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Atomic force microscopy; Biosensors; Calibration; Capacitors; Exact sciences and technology; Force feedback; Force measurement; Force sensors; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical instruments, equipment and techniques; microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Micromechanical devices and systems; microsensors; Multiaxis; Nanobioscience; Nanocomposites; Nanomaterials; Nanostructure; Optical microscopy; Physics; Sensor phenomena and characterization; Sensors; Torque measurement; Force measurement; microelectromechanical devices; Capacitors; Capacitive transducer; Measurement sensor; Calibration; Force sensors; Torque measurement; High sensitivity; Batch process; Microsensors; Microelectromechanical device; Production process
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/JMEMS.2009.2013387

This paper describes the design of a six-axis microelectromechanical systems (MEMS) force-torque sensor. A movable body is suspended by flexures that allow deflections and rotations along the x -, y -, and z -axes. The orientation of this movable body is sensed by seven capacitors. Transverse sensing is used for all capacitors, resulting in a high sensitivity. A batch fabrication process is described as capable of fabricating these multiaxis sensors with a high yield. The force sensor is experimentally investigated, and a multiaxis calibration method is described. Measurements show that the resolution is on the order of a micro-Newton and nano-Newtonmeter. This is the first six-axis MEMS force sensor that has been successfully developed.