Plasma oscillation method for measurements of absolute electron density in plasma

A new and simple method for precise measurements of electron density in a plasma with use of plasma oscillations is described. A weak electron beam is injected from a hot filament and excites electron waves oscillating at the plasma frequency ? p , whose sharp spectrum, obtained using a detector, gi...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 32; no. 11A; pp. 5129 - 5135
Main Authors SHIRAKAWA, T, SUGAI, H
Format Journal Article
LanguageEnglish
Published Tokyo Japanese journal of applied physics 01.11.1993
Subjects
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma diagnostic techniques and instrumentation
Inductively coupled plasma
Plasma diagnostics
Electron beams
Electron plasma waves
Measuring methods
Electron density
RF systems
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Summary:A new and simple method for precise measurements of electron density in a plasma with use of plasma oscillations is described. A weak electron beam is injected from a hot filament and excites electron waves oscillating at the plasma frequency ? p , whose sharp spectrum, obtained using a detector, gives the electron density. This plasma oscillation method is free of many difficulties often encountered with a Langmuir probe, such as thin film deposition, plasma potential fluctuation, and magnetic fields. The measurement technique is theoretically analyzed and experimentally demonstrated in the density measurements of an inductively coupled rf plasma, together with a comparison with the Langmuir probe method.
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.32.5129