The First Launch of an Autonomous Thrust-Driven Microrobot Using Nanoporous Energetic Silicon

• Published in: Journal of microelectromechanical systems Vol. 21; no. 1; pp. 198 - 205
• Main Authors: Churaman, W. A., Currano, L. J., Morris, C. J., Rajkowski, J. E., Bergbreiter, S.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.02.2012; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Actuation; Actuators; Applied sciences; Architecture; Autonomous; Autonomy; Capacitors; Computer science; control theory; systems; Control theory. Systems; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Jumping; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Micromechanical devices and systems; microrobot; Nanomaterials; Nanostructure; Physics; Platforms; Polymers; porous silicon; Precision engineering, watch making; Robot sensing systems; Robotics; Robots; Silicon; porous silicon; Macroscopic structure; Nanoporous materials; Low power; Micromachine; Robotics; microrobot; Propulsion; Silicon; Porosity; Autonomy; Kinetic energy; Jumping; Force control; Motion control; Robot; Microelectromechanical device; Thrust; Actuator
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/JMEMS.2011.2174414

As the capability and complexity of robotic platforms continue to evolve from the macro to the micron scale, the challenge of achieving autonomy requires the development of robust, lightweight architectures. These architectures must provide a platform upon which actuators, control, sensing, power, and communication modules are integrated for optimal performance. In this paper, the first autonomous jumping microrobotic platform is demonstrated using a hybrid integration approach to assemble on-board control, sensing, power, and actuation directly onto a polymer chassis. For the purposes of this paper, jumping is defined as brief parabolic motion achieved via an actuation pulse at takeoff. In this paper, the actuation pulse comes from the rapid release of chemical energy to create propulsion. The actuation pulse lasts several microseconds and is achieved using a novel high-force/low-power thrust actuator, nanoporous energetic silicon, resulting in 250 μJ of kinetic energy delivered to the robot and a vertical height of approximately 8 cm.