Closed-loop laser polishing using in-process surface finish metrology

This paper lays out the trail onto a closed-loop polishing process of optical elements enabling the application of the optimum polishing time needed. To that aim, an in-process testing method for monitoring an inclusive microsurface quality (e.g., comprising surface roughness and scratch-and-dig) wi...

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Bibliographic Details
Published inApplied optics. Optical technology and biomedical optics Vol. 57; no. 4; p. 834
Main Authors Faehnle, Oliver, Rascher, Rolf, Vogt, Christian, Kim, Dae Wook
Format Journal Article
LanguageEnglish
Published United States 01.02.2018
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Summary:This paper lays out the trail onto a closed-loop polishing process of optical elements enabling the application of the optimum polishing time needed. To that aim, an in-process testing method for monitoring an inclusive microsurface quality (e.g., comprising surface roughness and scratch-and-dig) within the polishing spot is analyzed, and its applicability to closed-loop polishing for classical loose-abrasive full-aperture polishing as well as for computer-controlled laser polishing is experimentally tested and verified. This enables the determination of the optimum local dwell time resulting in stable and cost-optimized polishing.
ISSN:2155-3165
DOI:10.1364/AO.57.000834