Construction of retarding field cylindrical mirror analyzer

• Published in: Japanese Journal of Applied Physics Vol. 30; no. 10; pp. 2636 - 2640
• Main Authors: SOHMA, M, KUROKAWA, A, SHIMIZU, R, SAKAI, Y
• Format: Journal Article
• Language: English
• Published: Tokyo Japanese journal of applied physics 01.10.1991
• Subjects: Electron, positron and ion microscopes, electron diffractometers and related techniques; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Physics; Auger electron spectrometry; Cylindrical mirror analyzer; Electron spectrometry; Retarding field
• ISSN: 0021-4922; 1347-4065
• DOI: 10.1143/jjap.30.2636

A retarding field cylindrical mirror analyzer (RF-CMA) was constructed. Particular attention was paid to setting up two hemispherical grid-meshes which provide the concentrical retarding field. The grid-meshes were prepared by photoetching and formed by cold working. Mesh holders were made by discharge machining with accuracy of less than several microns. The performance was examined by measuring elastic peaks and Ag-MVV Auger spectra for different retarding voltages. The result has confirmed that the present RF-CMA allows measurement of the spectrum with resolution twice as high as the conventional CMA without any decrease in the peak intensity of the signals. For higher retarding field, the energy resolution becomes higher as expected while the peak intensity gradually decreases, probably due to the distortion in the concentrical retarding field.