Improved performance of transparent-conducting AZO/Cu/AZO multilayer thin films by inserting a metal Ti layer for flexible electronics

In order to improve the performance of transparent conductive Al-doped ZnO (AZO)/Cu/Al-doped ZnO multilayer thin films, multilayer thin films of titanium-embedded AZO/Cu/AZO structures have been designed and deposited onto flexible polycarbonate substrates to develop an indium-free transparent flexi...

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Bibliographic Details
Published inOptics letters Vol. 42; no. 15; p. 3020
Main Authors Yu, Shihui, Liu, Yifan, Zheng, Haoran, Li, Lingxia, Sun, Yongtao
Format Journal Article
LanguageEnglish
Published United States 01.08.2017
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Summary:In order to improve the performance of transparent conductive Al-doped ZnO (AZO)/Cu/Al-doped ZnO multilayer thin films, multilayer thin films of titanium-embedded AZO/Cu/AZO structures have been designed and deposited onto flexible polycarbonate substrates to develop an indium-free transparent flexible electrode. The effect of Ti layer on the structural, optical, and electrical properties of multilayer thin films was investigated. The experiments reveal that the AZO/Ti/Cu/AZO fabricated in argon-oxygen mixtures has the best performance (commutation quality factor of 422.0): resistivity of 3.85×10   Ω·cm, sheet resistance of 4.31  Ω/sq, carrier concentration of 1.65×10   cm , mobility of 9.87  cm /Vs, and acceptable luminous transmittance of above 82% in the visible range.
ISSN:1539-4794
DOI:10.1364/ol.42.003020