Response of a DRAM to single-ion tracks of different heavy-ion species and stopping powers

Multiple-bit errors caused by single-ion tracks in a 256-kb DRAM fabricated by a bulk process were observed for different ion species and stopping power values. The results demonstrate the utility of this device for the evaluation of ion-beam uniformity and ion-beam-induced charge collection in IC d...

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Bibliographic Details
Published inIEEE Transactions on Nuclear Science (Institute of Electrical and Electronics Engineers); (USA) Vol. 37; no. 6; pp. 1844 - 1848
Main Authors Zoutendyk, J.A., Smith, L.S., Edmonds, L.D.
Format Journal Article Conference Proceeding
LanguageEnglish
Published Legacy CDMS IEEE 01.12.1990
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Summary:Multiple-bit errors caused by single-ion tracks in a 256-kb DRAM fabricated by a bulk process were observed for different ion species and stopping power values. The results demonstrate the utility of this device for the evaluation of ion-beam uniformity and ion-beam-induced charge collection in IC devices. The data indicate that single-ion-induced charge transport results in multiple-bit error clusters due to lateral diffusion of excess minority carriers (electrons). Charge collection occurred from a depth of up to 35 mu m from te surface of the device. An apparent charge loss was observed for very heavy ions with a high stopping power (Au at 350 MeV).< >
Bibliography:CDMS
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CONF-900723-
ISSN:0018-9499
1558-1578
DOI:10.1109/23.101199