Response of a DRAM to single-ion tracks of different heavy-ion species and stopping powers
Multiple-bit errors caused by single-ion tracks in a 256-kb DRAM fabricated by a bulk process were observed for different ion species and stopping power values. The results demonstrate the utility of this device for the evaluation of ion-beam uniformity and ion-beam-induced charge collection in IC d...
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Published in | IEEE Transactions on Nuclear Science (Institute of Electrical and Electronics Engineers); (USA) Vol. 37; no. 6; pp. 1844 - 1848 |
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Main Authors | , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
Legacy CDMS
IEEE
01.12.1990
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Subjects | |
Online Access | Get full text |
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Summary: | Multiple-bit errors caused by single-ion tracks in a 256-kb DRAM fabricated by a bulk process were observed for different ion species and stopping power values. The results demonstrate the utility of this device for the evaluation of ion-beam uniformity and ion-beam-induced charge collection in IC devices. The data indicate that single-ion-induced charge transport results in multiple-bit error clusters due to lateral diffusion of excess minority carriers (electrons). Charge collection occurred from a depth of up to 35 mu m from te surface of the device. An apparent charge loss was observed for very heavy ions with a high stopping power (Au at 350 MeV).< > |
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Bibliography: | CDMS Legacy CDMS SourceType-Scholarly Journals-2 ObjectType-Feature-2 ObjectType-Conference Paper-1 content type line 23 SourceType-Conference Papers & Proceedings-1 ObjectType-Article-3 ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 CONF-900723- |
ISSN: | 0018-9499 1558-1578 |
DOI: | 10.1109/23.101199 |