Molecular-absorption-induced thermal bistability in PECVD silicon nitride microring resonators

The wavelength selective linear absorption in communication C-band is investigated in CMOS-processed PECVD silicon nitride rings. In the overcoupled region, the linear absorption loss lowers the on-resonance transmission of a ring resonator and increases its overall quality factor. Both the linear a...

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Bibliographic Details
Published inOptics express Vol. 22; no. 15; pp. 18412 - 18420
Main Authors Gu, Tingyi, Yu, Mingbin, Kwong, Dim-Lee, Wong, Chee Wei
Format Journal Article
LanguageEnglish
Published United States Optical Society of America (OSA) 28.07.2014
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