Molecular-absorption-induced thermal bistability in PECVD silicon nitride microring resonators

The wavelength selective linear absorption in communication C-band is investigated in CMOS-processed PECVD silicon nitride rings. In the overcoupled region, the linear absorption loss lowers the on-resonance transmission of a ring resonator and increases its overall quality factor. Both the linear a...

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Published inOptics express Vol. 22; no. 15; pp. 18412 - 18420
Main Authors Gu, Tingyi, Yu, Mingbin, Kwong, Dim-Lee, Wong, Chee Wei
Format Journal Article
LanguageEnglish
Published United States Optical Society of America (OSA) 28.07.2014
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Summary:The wavelength selective linear absorption in communication C-band is investigated in CMOS-processed PECVD silicon nitride rings. In the overcoupled region, the linear absorption loss lowers the on-resonance transmission of a ring resonator and increases its overall quality factor. Both the linear absorption and ring quality factor are maximized near 1520 nm. The direct heating by phonon absorption leads to thermal optical bistable switching in PECVD silicon nitride based microring resonators. We calibrate the linear absorption rate in the microring resonator by measuring its transmission lineshape at different laser power levels, consistent with coupled mode theory calculations.
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USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
SC0001085
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.22.018412