Experimental Study of Gyro Sensor Using Double-Ended Tuning Fork Quartz Resonator

• Published in: Japanese Journal of Applied Physics Vol. 43; no. 5S; p. 3000
• Main Authors: Sato, Kenji, Ono, Atsushi, Tomikawa, Yoshiro
• Format: Journal Article
• Language: English
• Published: 2004
• ISSN: 0021-4922; 1347-4065
• DOI: 10.1143/JJAP.43.3000

In this study, we focus on a flatly supported gyro sensor using a double-ended tuning fork quartz resonator set in parallel with the rotating plane. The resonator has the advantages of flat form, high precision and strong shock resistance; moreover, fundamentally, the resonator is able to detect two-axial angular velocities. We clarified the features of the resonator by discussing the advantages and disadvantages of the resonator as a gyro sensor. The resonator was designed to have high detection efficiency, applying the vibration theory and using the finite element method. The resonator was finely fabricated by photolithography and wet etching. As a result, the resonators, without any problem as a gyro sensor, have been fabricated; we also confirmed experimentally that the practical angular velocity could be detected by the prototype gyro sensor. Consequently, we can conclude that the double-ended tuning fork quartz resonator could be used as the flatly supported gyro sensor.