APA (7th ed.) Citation

Sudoh, K., Hiruta, R., & Kuribayashi, H. (2013). Shape evolution of high aspect ratio holes on Si(001) during hydrogen annealing. Journal of applied physics, 114(18), . https://doi.org/10.1063/1.4829912

Chicago Style (17th ed.) Citation

Sudoh, K., R. Hiruta, and H. Kuribayashi. "Shape Evolution of High Aspect Ratio Holes on Si(001) During Hydrogen Annealing." Journal of Applied Physics 114, no. 18 (2013). https://doi.org/10.1063/1.4829912.

MLA (9th ed.) Citation

Sudoh, K., et al. "Shape Evolution of High Aspect Ratio Holes on Si(001) During Hydrogen Annealing." Journal of Applied Physics, vol. 114, no. 18, 2013, https://doi.org/10.1063/1.4829912.