Parametric optimization of multilevel diffractive optical elements by electromagnetic theory

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Bibliographic Details
Published in	Applied optics (2004) Vol. 31; no. 28; p. 5910
Main Authors	Noponen, E, Turunen, J, Vasara, A
Format	Journal Article
Language	English
Published	United States 01.10.1992
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ISSN:	1559-128X
DOI:	10.1364/ao.31.005910