Shape deviations of DLW microstructures in dependency of fabrication parameters

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Bibliographic Details
Published inJournal of micromechanics and microengineering Vol. 31; no. 12; pp. 125002 - 125009
Main Authors Fritzsche, Sven, Topolniak, Ievgenia, Weise, Matthias, Sturm, Heinz
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.12.2021
Subjects
2PP
direct laser writing
shape deformations
SZ2080
two photon polymerization
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Bibliography:JMM-105398.R2
ISSN:0960-1317
1361-6439
DOI:10.1088/1361-6439/ac2a14