Controlling large-scale film morphology by phase manipulation in interference lithography

An experimental arrangement is described where a Babinet-Soleil compensator is inserted into the path of one of the three beams used for noncoplanar beam interference lithography. This birefringent element can change the phase of the beam so that either a positive two-dimensional pattern or an inver...

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Bibliographic Details
Published inApplied optics (2004) Vol. 46; no. 29; p. 7202
Main Authors Lu, Cheng, Hu, X K, Dimov, S S, Lipson, R H
Format Journal Article
LanguageEnglish
Published United States 10.10.2007
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Summary:An experimental arrangement is described where a Babinet-Soleil compensator is inserted into the path of one of the three beams used for noncoplanar beam interference lithography. This birefringent element can change the phase of the beam so that either a positive two-dimensional pattern or an inverselike structure is generated in a photoresist without disturbing the mechanical geometry of the setup. Simulations are presented that confirm the validity of this approach. Large defect-free sample areas (>1 cm(2)) with submicrometer periodic patterns were obtained by expanding the laser beams used in the lithography experiment.
ISSN:1559-128X
DOI:10.1364/ao.46.007202