Superhard Vacuum Coatings Based on High-Entropy Alloys

• Published in: Powder metallurgy and metal ceramics Vol. 54; no. 11-12; pp. 725 - 730
• Main Authors: Gorban’, V. F., Shaginyan, R. A., Krapivka, N. A., Firstov, S. A., Danilenko, N. I., Serdyuk, I. V.
• Format: Journal Article
• Language: English
• Published: New York Springer US 01.03.2016; Springer; Springer Nature B.V
• Subjects: Alloys; Aluminum; Ceramics; Characterization and Evaluation of Materials; Chemical composition; Chemistry and Materials Science; Coatings; Composites; Copper; Glass; High entropy alloys; Magnetron sputtering; Materials Science; Metallic Materials; Metals (Materials); Microhardness; Modulus of elasticity; Natural Materials; Organic chemistry; Phase composition; Specialty metals industry; Substrates; phase composition; hardness; magnetron-sputtered coating; high-entropy alloy; microstructure; elastic modulus
• ISSN: 1068-1302; 1573-9066
• DOI: 10.1007/s11106-016-9767-2

High-entropy TiZrVNbTa, AlCrFeCoNiCuV, and TiZrHfNbTaCr alloy coatings with a thickness of 2.5–6 μm and with various phase compositions were deposited by dc magnetron sputtering. The chemical and phase composition of the TiZrVNbTa and TiZrHfNbTaCr coatings do not change substantially during deposition. Only when the substrate bias is higher than –180 V, the deposited AlCrFeCoNiCuV alloy coatings are depleted of Al and Cu. All the coatings are nanostructured, and their microhardness varies between 10 and 19 GPa, and reduced elastic modulus changes between 106 and 192 GPa depending on the phase composition.