Microstructure and composition analysis of low-Z/low-Z multilayers by combining hard and resonant soft X-ray reflectivity

Microstructure and composition analysis of periodic multilayer structure consisting of a low electron density contrast (EDC) material combination by grazing incidence hard X-ray reflectivity (GIXR), resonant soft X-ray reflectivity (RSXR), and transmission electron microscopy (TEM) are presented. Me...

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Bibliographic Details
Published inJournal of applied physics Vol. 119; no. 24
Main Authors Rao, P. N., Rai, S. K., Srivastava, A. K., Ganguli, T., Dhawan, R., Naik, P. A.
Format Journal Article
LanguageEnglish
Published Melville American Institute of Physics 28.06.2016
Subjects
Applied physics
Boron carbide
BORON CARBIDES
CARBON
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
Composition
ELECTRON DENSITY
GRAZING
HARD X RADIATION
LAYERS
MICROSTRUCTURE
Multilayers
Parameter sensitivity
PERIODICITY
Reflectance
REFLECTIVITY
ROUGHNESS
SCATTERING
SENSITIVITY
SOFT X RADIATION
Soft x rays
THICKNESS
TRANSMISSION ELECTRON MICROSCOPY
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Summary:Microstructure and composition analysis of periodic multilayer structure consisting of a low electron density contrast (EDC) material combination by grazing incidence hard X-ray reflectivity (GIXR), resonant soft X-ray reflectivity (RSXR), and transmission electron microscopy (TEM) are presented. Measurements of reflectivity at different energies allow combining the sensitivity of GIXR data to microstructural parameters like layer thicknesses and interfacing roughness, with the layer composition sensitivity of RSXR. These aspects are shown with an example of 10-period C/B4C multilayer. TEM observation reveals that interfaces C on B4C and B4C on C are symmetric. Although GIXR provides limited structural information when EDC between layers is low, measurements using a scattering technique like GIXR with a microscopic technique like TEM improve the microstructural information of low EDC combination. The optical constants of buried layers have been derived by RSXR. The derived optical constants from the measured RSXR data suggested the presence of excess carbon into the boron carbide layer.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.4954679