AFM lithography for TAMM plasmons observation

The results of the formation of planar nanostructures with relief, repeating the trajectory of movement of an AFM probe were presented. The parameters affecting their geometric dimensions: height, width, uniformity in the layer, etc. were investigated. The method of induced deposition of silver/gold...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 951; no. 1; pp. 12021 - 12024
Main Authors Shagurina, A, Kutrovskaya, S, Skryabin, I, Kel', A
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.01.2018
Subjects
Electric fields
Hybrid circuits
Physics
Plasmons
Silicon wafers
Transducers
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Summary:The results of the formation of planar nanostructures with relief, repeating the trajectory of movement of an AFM probe were presented. The parameters affecting their geometric dimensions: height, width, uniformity in the layer, etc. were investigated. The method of induced deposition of silver/golden clusters on the silicon wafer surface p-type in the presence of an external electric field was developed. The possibility of using such structures as hybrid circuits using photoelectronic transducers was discussed.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/951/1/012021