Hybrid powder-sol–gel PZT thick films on metallic membranes for piezoelectric applications

• Published in: Journal of the European Ceramic Society Vol. 27; no. 13; pp. 4139 - 4142
• Main Authors: Es-Souni, M., Maximov, S., Piorra, A., Krause, J., Solterbeck, C.-H.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Oxford Elsevier Ltd 2007; Elsevier
• Subjects: Chemistry; Colloidal gels. Colloidal sols; Colloidal state and disperse state; Dielectric properties; Exact sciences and technology; General and physical chemistry; Membranes; PZT; Sensors; Sol–gel processes; Membranes; Sol–gel processes; PZT; Sensors; Dielectric properties; Lead oxide; Film; Transition element compounds; Lead Titanates; Powder; Quaternary compound; Zirconium oxide; Thick film; Piezoelectric materials; Transition metal alloy; Sol gel process; Lead Zirconates; Sol-gel processes; Membrane; Silicon; Nickel Alloys; Titanium oxide
• ISSN: 0955-2219; 1873-619X
• DOI: 10.1016/j.jeurceramsoc.2007.02.107

A hybrid sol–gel-powder method was used to process 3–6 μm thick lead zirconate titanate films via spin-coating a Ni-base alloy and silicon substrates. The films were crack free and possessed a fine microstructure. High effective piezoelectric coefficients, d 33, of 250 pm/V were obtained from piezoelectric hysteresis loops using a laser vibrometer. Crack free sensor membranes were obtained from these film heterostructures via laser beam micromachining, and their resonance behaviour was studied. Metallic membranes showed the best characteristics where deflections of up to 120 nm at resonance could be obtained at an excitation voltage amplitude of 0.5 V. Characterization of the membranes in terms of output current and voltage was also performed, and show the suitability of such heterostructures for piezoelectric sensor applications.