Stretching-tunable metal gratings fabricated on an elastomeric substrate using a water-soluble sacrificial layer

We report a new method to fabricate stretching-tunable metal gratings on elastomeric substrates by combining nanoimprint lithography and metal transfer using a patterned sacrificial layer. Fabrication of metal lines with a period of 550 nm and a linewidth of 270 nm was demonstrated on polydimethylsi...

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Bibliographic Details
Published inApplied physics. A, Materials science & processing Vol. 121; no. 2; pp. 335 - 341
Main Authors Gu, Ronghua, Ji, Min, Xuan, Yan, Cui, Yushuang, Yuan, Changsheng, Li, Wen-Di, Ge, Haixiong, Chen, Yanfeng
Format Journal Article
LanguageEnglish
Published Berlin/Heidelberg Springer Berlin Heidelberg 01.11.2015
Subjects
Characterization and Evaluation of Materials
Condensed Matter Physics
Invited Paper
Machines
Manufacturing
Nanotechnology
Optical and Electronic Materials
Physics
Physics and Astronomy
Processes
Surfaces and Interfaces
Thin Films
Grating Period
PDMS Membrane
Flexible Substrate
Sacrificial Layer
PDMS
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Summary:We report a new method to fabricate stretching-tunable metal gratings on elastomeric substrates by combining nanoimprint lithography and metal transfer using a patterned sacrificial layer. Fabrication of metal lines with a period of 550 nm and a linewidth of 270 nm was demonstrated on polydimethylsiloxane (PDMS) membranes using this process. Optical diffraction characterization was used to measure the period of stretched gratings on the PDMS membrane and demonstrates tuning of the grating period by deforming the carrying PDMS substrate. The pattern transfer process using a water-soluble sacrificial layer can also be applied to fabrication of other deformable micro- and nano-devices.
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-015-9270-5