Screen Printed Free-standing Resonator with Piezoelectric Excitation and Detection on Flexible Substrate

This paper reports the design, fabrication and testing of a free-standing encastre beam resonator which is entirely fabricated using screen printing onto a flexible polyimide substrate. The fabrication of the free-standing resonator was achieved using sacrificial techniques. The resonator was design...

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Bibliographic Details
Published inProcedia engineering Vol. 87; pp. 947 - 950
Main Authors Jamel, Nursabirah, Zhu, Dibin, Almusallam, Ahmed, Torah, Russel, Yang, Kai, Beeby, Steve P., Tudor, John
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 2014
Subjects
Free-standing encastre beam
Piezoelectric
Resonator
Sacrificial technology
Screen printing
Screen printing
Resonator
Free-standing encastre beam
Sacrificial technology
Piezoelectric
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Summary:This paper reports the design, fabrication and testing of a free-standing encastre beam resonator which is entirely fabricated using screen printing onto a flexible polyimide substrate. The fabrication of the free-standing resonator was achieved using sacrificial techniques. The resonator was designed to be excited at one end of the beam and the vibrations detected on the other end using piezoelectric material. The resonator was 11mm long and 4mm wide with an air gap of 119μm, created by selectively removing the sacrificial layer. The device resonates in air with maximum generated voltage of 0.1545 volt at fundamental frequency of 3.834kHz.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2014.11.313