Thickness Effect on the Structural and Electrical Properties of Sputtered YBCO Coated Conductors

• Published in: IEEE transactions on applied superconductivity Vol. 21; no. 3; pp. 2945 - 2948
• Main Authors: Tao, Bowan, Zhang, Ning, Zhang, Fei, Xia, Yudong, Feng, Xiao, Xue, Yan, Zhao, Xiaohui, Xiong, Jie, Li, Yanrong
• Format: Journal Article Conference Proceeding
• Language: English
• Published: New York, NY IEEE 01.06.2011; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Applied sciences; Buffer layers; Conductors; COPPER OXIDE; DEPOSITION; Diffraction; Electric connection. Cables. Wiring; ELECTRICAL CONDUCTORS; Electrical engineering. Electrical power engineering; ELECTRICAL PROPERTIES; Electromagnets; Electronics; Exact sciences and technology; Film thickness; Integrated circuits; Microelectronic fabrication (materials and surfaces technology); PROPERTIES; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; SPUTTERING; structural variation; Substrates; SUPERCONDUCTIVITY; SUPERCONDUCTORS; Surface treatment; thickness; Various equipment and components; X RAYS; YBCO; YBCO superconductors; Yttrium barium copper oxide; YTTRIUM OXIDE; Critical current density; Electrical properties; thickness; Experimental study; X ray diffraction; Layer thickness; Coated material; Optimization; Sputter coating; Microelectronic fabrication; structural variation; Size effect; Electrical conductor; YBCO; High temperature superconductor; Electrical characteristic
• ISSN: 1051-8223; 1558-2515
• DOI: 10.1109/TASC.2010.2090439

In this paper we studied the structural and electrical properties variations with the thickness of YBa 2 Cu 3 O 7-X (YBCO) film. In our experiments, the critical current density (Jc) has a maximum at 1.2 micron rather than monotonically decreased with increasing film thickness. The in-plane and out-plane alignments of the films, measured with X-ray Diffraction Omega-scan and Phi-scan, were poor at the beginning stage of the deposition and then became better as the film thickness increased.The surfaces of different samples also change a lot while films less than 700 nm in thickness. Under optimized deposition conditions, biaxial textured YBCO films have been obtained, with the full width at half maximum being 2.1° and 4.5° for out-of-plane and in-plane orientations respectively, Jc greater than 1.2 MA/cm 2 at 77 K, self field.