Scanning force microscope as a tool for studying optical surfaces

The scanning force microscope (SFM) is used to study the characteristics of optical surfaces, such as polished and precision-machined surfaces and thin-film structures. Previously unreported images of raised surface scratches and clumpiness on the surface of extremely smooth dielectric films are pre...

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Bibliographic Details
Published inApplied optics (2004) Vol. 34; no. 1; p. 213
Main Authors Bennett, J M, Jahanmir, J, Podlesny, J C, Balter, T L, Hobbs, D T
Format Journal Article
LanguageEnglish
Published United States 01.01.1995
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Summary:The scanning force microscope (SFM) is used to study the characteristics of optical surfaces, such as polished and precision-machined surfaces and thin-film structures. Previously unreported images of raised surface scratches and clumpiness on the surface of extremely smooth dielectric films are presented. The characteristics of SFM's that are important in studying optical surfaces are discussed. They include the effects of tip geometry, surface charging, particulate contamination, scanner artifacts, and instrument calibration.
ISSN:1559-128X
DOI:10.1364/ao.34.000213