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Published in | Semiconductor science and technology Vol. 34; no. 9; pp. 98002 - 98005 |
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Main Author | |
Format | Journal Article |
Language | English |
Published |
IOP Publishing
01.09.2019
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Online Access | Get full text |
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Bibliography: | SST-105807 |
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ISSN: | 0268-1242 1361-6641 |
DOI: | 10.1088/1361-6641/ab366b |