Method for Evaluating the Corrosion Resistance of Aluminum Metallization of Integrated Circuits under Multifactorial Influence

The influence of complex influence of climatic factors (temperature, humidity) and electric mode (supply voltage) on the corrosion resistance of metallization of integrated circuits has been considered. The regression dependence of the average time of trouble-free operation t on the mentioned factor...

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Bibliographic Details
Published inIOP conference series. Materials Science and Engineering Vol. 317; no. 1; pp. 12059 - 12062
Main Author Kolomiets, V. I.
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.03.2018
Subjects
Accelerated tests
Aluminum
CMOS
Corrosion resistance
Corrosion tests
Integrated circuits
Metallizing
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Summary:The influence of complex influence of climatic factors (temperature, humidity) and electric mode (supply voltage) on the corrosion resistance of metallization of integrated circuits has been considered. The regression dependence of the average time of trouble-free operation t on the mentioned factors has been established in the form of a modified Arrhenius equation that is adequate in a wide range of factor values and is suitable for selecting accelerated test modes. A technique for evaluating the corrosion resistance of aluminum metallization of depressurized CMOS integrated circuits has been proposed.
ISSN:1757-8981
1757-899X
DOI:10.1088/1757-899X/317/1/012059