Structure and phase composition of thin a-C:H films modified by Ag and Ti

• Published in: Optics and spectroscopy Vol. 123; no. 3; pp. 383 - 387
• Main Authors: Prikhodko, O. Yu, Mikhailova, S. L., Mukhametkarimov, Ye. S., Dauthan, K., Maksimova, S. Ya
• Format: Journal Article
• Language: English
• Published: Moscow Pleiades Publishing 01.09.2017; Springer Nature B.V
• Subjects: Carbon; Carbon-epoxy composites; Chemical bonds; Condensed-Matter Spectroscopy; Graphitization; Lasers; Magnetron sputtering; Optical Devices; Optics; Phase composition; Photoelectron spectroscopy; Photonics; Physics; Physics and Astronomy; Raman spectra; Silver; Spectrum analysis; Thin films; Titanium; Titanium oxides
• ISSN: 0030-400X; 1562-6911
• DOI: 10.1134/S0030400X17090260

The structure and phase composition of thin a-C:H and a-C:H〈 M 〉 films ( M = Ag, Ti, or Ag + Ti) have been studied by Raman and X-ray photoelectron spectroscopy. The a-C:H〈 M 〉 films were prepared by ion-plasma magnetron sputtering of a combined target of graphite and metal in an Ar–CH 4 gas mixture. The Raman spectra of these films indicate that their structure is amorphous. The a-C:H〈Ag + Ti〉 films have a more graphitized structure in comparison with pure a-C:H films and films containing only one metal. It is established that carbon in the a-C:H〈Ag + Ti〉 films is in the sp 2 , sp 3 , and C=O states, which are characteristic of the a-C:H, a-C:H〈Ag〉, and a-C:H〈Ti〉 films. In addition, there are also ether (–C–O–C–) or epoxy (‒C‒O–) carbon groups in the a-C:H〈Ag + Ti〉 films. It has been revealed that silver atoms in the a-C:H〈Ag〉 and a-C:H〈Ag + Ti〉 films form no chemical bonds with carbon, oxygen, and titanium. Titanium in the a-C:H〈Ti〉 and a-C:H〈Ag + Ti〉 films exists in the form of titanium IV oxide (TiO 2 ).