Replicated optical MEMS in sol-gel materials

Replication technology using sol-gel materials offers an interesting alternative to the current approach to optical microelectromechanical systems (MEMS) fabricated in silicon using lithographic and micromachining technologies. The use of UV-curable sol-gel materials enables optical features such as...

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Bibliographic Details
Published inIEEE journal of selected topics in quantum electronics Vol. 10; no. 3; pp. 440 - 444
Main Authors Obi, S., Gale, M.T., Gimkiewicz, C., Westenhofer, S.
Format Journal Article
LanguageEnglish
Published New York IEEE 01.05.2004
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Diffractive optical elements
Materials selection
Microelectromechanical systems
Microlenses
Micromachining
Micromechanical devices
Microoptics
Microstructure
Nanostructured materials
Optical films
Optical materials
Optical refraction
Optical variables control
Quantum electronics
Replication
Semiconductor materials
Sol gel process
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Summary:Replication technology using sol-gel materials offers an interesting alternative to the current approach to optical microelectromechanical systems (MEMS) fabricated in silicon using lithographic and micromachining technologies. The use of UV-curable sol-gel materials enables optical features such as microlenses and diffractive optical elements to be fabricated in the same process step as the MEMS structures, and has the potential of low-cost high-resolution mass-production technology. This paper describes progress in work aimed at investigating the potential of this approach.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
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ISSN:1077-260X
1558-4542
DOI:10.1109/JSTQE.2004.829208