Radio-Frequency Discharge at Low Pressure: A Non-local Problem Statement Approach

Self-consistent nonlocal nonlinear mathematical CCRF discharge model is constructed. The model includes the convection – diffusion equations for electronic and ionic gas, Poisson's equation for electric field potential, the equation of balance of metastable as well as ground states neutral atom...

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Bibliographic Details
Published inProcedia engineering Vol. 150; pp. 1041 - 1045
Main Authors Dubrovin, V.T., Chebakova, V.Ju, Zheltukhin, V.S.
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 2016
Subjects
difference scheme
iterative method
local statement
low-temperature plasma
Mathematical simulation
radio-frequency capacitive discharge
radio-frequency capacitive discharge
low-temperature plasma
iterative method
Mathematical simulation
difference scheme
local statement
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Summary:Self-consistent nonlocal nonlinear mathematical CCRF discharge model is constructed. The model includes the convection – diffusion equations for electronic and ionic gas, Poisson's equation for electric field potential, the equation of balance of metastable as well as ground states neutral atoms, and stationary equation of heat conductivity for electronic and ionic gases. An algorithm for the numerical solutions of the model has been described. The results of test calculations of CCRF discharge characteristics at the interelectrode distance of 2.2cm, the gas pressure of 13.3Pa, the voltage amplitude of 65V were obtained. Comparison of the results showed the accuracy of the results and proved the adequacy of the mathematical model and the method of calculation.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2016.07.211