Advances in precise positioning using the electrostatic glass motor
This paper reports the continuation of the authors' work in the field of linear and rotary submicrometric positioning using electrostatic glass motors. Electrostatic glass motors, a recent development where a glass rotor, once polarized using a static electrostatic field, is synchronously follo...
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Published in | IEEE transactions on industry applications Vol. 41; no. 4; pp. 972 - 977 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
New York
IEEE
01.07.2005
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subjects | |
Online Access | Get full text |
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Summary: | This paper reports the continuation of the authors' work in the field of linear and rotary submicrometric positioning using electrostatic glass motors. Electrostatic glass motors, a recent development where a glass rotor, once polarized using a static electrostatic field, is synchronously following a moving electrostatic field, have been described previously. The potential application to precise positioning was proven feasible and promising. The present report describes a fully operational rotary prototype, featuring remarkable performance. It will be shown that sub-arc-second positioning is possible in open-loop operation, over an infinite operation range, and over a very broad speed range. After a brief recapitulation of the propulsion principle, the realized system will be presented and characterized, its performance experimentally determined, and discussed. Finally, potential industrial applications of the electrostatic glass motor will be proposed. |
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Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 ObjectType-Article-2 ObjectType-Feature-1 |
ISSN: | 0093-9994 1939-9367 |
DOI: | 10.1109/TIA.2005.851015 |