Influence of the substrate temperature on the microstructure and electron-induced secondary electron emission properties of MgO/Au composite film

[Display omitted] •MgO/Au film was prepared by magnetron sputtering of individual Mg and Au targets.•A higher substrate temperature (Ts) is conducive to the growth of MgO grains.•The surface roughness firstly rises and then decreases with Ts increasing.•The increase of Ts greatly enhances the SEE co...

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Bibliographic Details
Published inMaterials research bulletin Vol. 100; pp. 308 - 312
Main Authors Li, Jie, Hu, Wenbo, Hao, Ling, Wu, Shengli, Zhang, Jintao
Format Journal Article
LanguageEnglish
Published United States Elsevier Ltd 01.04.2018
Subjects
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
DEPOSITION
ELECTRON BEAMS
ELECTRON EMISSION
GOLD
GRAIN GROWTH
MAGNESIUM OXIDES
MAGNETRONS
MgO/Au composite film
MICROSTRUCTURE
ROUGHNESS
Secondary electron emission
SECONDARY EMISSION
SPUTTERING
Substrate temperature
Surface charging
SURFACES
TEMPERATURE DEPENDENCE
THIN FILMS
Surface charging
Secondary electron emission
MgO/Au composite film
Substrate temperature
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Summary:[Display omitted] •MgO/Au film was prepared by magnetron sputtering of individual Mg and Au targets.•A higher substrate temperature (Ts) is conducive to the growth of MgO grains.•The surface roughness firstly rises and then decreases with Ts increasing.•The increase of Ts greatly enhances the SEE coefficient of the composite film. The influence of the substrate temperature (Ts) on the microstructure and electron-induced secondary electron emission (SEE) properties of MgO/Au composite film prepared by reactive magnetron sputtering was investigated in order to improve the SEE performance of this composite film. During the deposition of MgO/Au film, a relatively high Ts is conducive to the growth of MgO grains and causes the formation of some large aggregated gold particles on which MgO grains cover in the composite film. In terms of the SEE properties of MgO/Au film, the increase of Ts brings about a significant improvement of SEE coefficient (δ), while it also leads to a slightly accelerated SEE degradation under the continuous electron bombardment due to a faster surface charging. The MgO/Au film prepared at Ts of 773 K has a δ value of 4.9 at a primary electron energy of 200 eV and the maximum δ value of 11.5.
ISSN:0025-5408
1873-4227
DOI:10.1016/j.materresbull.2018.01.002