Effects of the Focused Ion Beam Parameters on Nanopore Milling in Solid State Membranes

This work describes a reliable nanofabrication technology of solid state nanopore arrays. The geometric parameters of pores are achieved and optimized according to the requirements of bioanalytical applications regarding conformation and size of the characteristic proteins in clinical diagnostics. D...

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Bibliographic Details
Published inProcedia engineering Vol. 47; pp. 684 - 687
Main Authors Fürjes, P., Fekete, Z., Illés, L., Tóth, A.L., Battistig, G., Gyurcsányi, R.E.
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 2012
Subjects
Biochemical sensing
Focused ion beam
Solid state nanopore
Biochemical sensing
Solid state nanopore
Focused ion beam
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Summary:This work describes a reliable nanofabrication technology of solid state nanopore arrays. The geometric parameters of pores are achieved and optimized according to the requirements of bioanalytical applications regarding conformation and size of the characteristic proteins in clinical diagnostics. Different structural configurations and material compositions of the nanopore structures were developed and characterised according to the variable biofunctionalisation strategies. The geometry of the fabricated pores were analysed as the statistical function of the focused ion beam milling parameters.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2012.09.239