Response of Sample Temperature during Straight-Line Ion Implantation

A theoretical model for calculation of the sample temperature during straight-line nitrogen ion implantation was established based on the results of experiment in this paper. Taking the pure aluminum as the samples, and from the transformation of electric energy into thermal energy, the calculated v...

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Bibliographic Details
Published inPlasma science & technology Vol. 7; no. 1; pp. 2678 - 2680
Main Authors Fanya, Jin, Liyun, Xu, Zhongbing, Shi, Huaying, Liu, Ke, Wang, Liru, Shen, Honghui, Tong
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.02.2005
Southwesten Institute of Physics, Chengdu 610041, China
Subjects
ion implantation
simulation
response of temperature
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Summary:A theoretical model for calculation of the sample temperature during straight-line nitrogen ion implantation was established based on the results of experiment in this paper. Taking the pure aluminum as the samples, and from the transformation of electric energy into thermal energy, the calculated values of the temperature were in good agreement with the measured values in the experiment. According to the simulation, this technology can be applied to the control of specimens temperature during the implantation.
ISSN:1009-0630
DOI:10.1088/1009-0630/7/1/018