Investigation of Overflow-Water-Assisted Femtosecond Laser-Induced Plasma Modulation of Microchannel Morphology

• Published in: Coatings (Basel) Vol. 13; no. 9; p. 1541
• Main Authors: Zhao, Runhan, Ma, Chenbin, Gao, Xiaojie, Zhang, Hailong, Wang, Xingsheng
• Format: Journal Article
• Language: English
• Published: Basel MDPI AG 01.09.2023
• Subjects: Ablation; Analysis; Direct laser writing; Efficiency; Heat affected zone; High aspect ratio; Integrated circuit fabrication; Investigations; Laser plasmas; Lasers; Machining; Material removal rate (machining); Microchannels; Microelectromechanical systems; Micromachining; Morphology; Plasma; Process parameters; Software
• ISSN: 2079-6412; 2079-6412
• DOI: 10.3390/coatings13091541

Laser-induced plasma micromachining (LIPMM) process is an effective approach to create microfeatures with high aspect ratio (AR) and reduced heat affected zone (HAZ). Therefore, LIPMM plays a crucial role in improving the morphology of microchannels. In this study, microchannels were fabricated using a femtosecond laser with two distinct sets of process parameters under three different processing methods: overflow-water-assisted laser-induced plasma micromachining (OF-LIPMM), laser direct writing (LDW), and static water laser-induced plasma micromachining (S-LIPMM). Furthermore, single-factor experiments were conducted to systematically analyze the effects of four parameters, namely single-pulse energy, scanning speed, scanning times, and frequency, on the HAZ, AR, and material removal rate (MRR) of the microchannels. Finally, the optimized parameters determined from the single-factor experiments were applied for large-scale grid fabrication on a surface. The experimental results revealed that OF-LIPMM enables the creation of two different kinds of microchannel surfaces: one microchannel was fabricated with a higher AR of 3:1 and a larger HAZ, while another microchannel was created with a lower AR of 1:1 and a reduced HAZ. Moreover, the parameters investigated in the single-factor experiments can be applied to large-scale processing. The results also indicate that variations of the scanning speed, frequency, and single-pulse energy have similar effects on the machining characteristics of the three processing methods. The findings enable the generation of microchannels with favorable morphological characteristics and have significant implications for the large-scale production of both types of microchannels.