Structural and electrical properties of cubic boron nitride thin films on (100)GaAs
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Published in | Semiconductor science and technology Vol. 17; no. 11; pp. 1141 - 1143 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Bristol
IOP Publishing
01.11.2002
Institute of Physics |
Subjects | |
Online Access | Get full text |
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ISSN: | 0268-1242 1361-6641 |
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DOI: | 10.1088/0268-1242/17/11/301 |