Reverse recovery characteristics and defect distribution in an electron-irradiated silicon p–n junction diode
Electron irradiation was performed to enhance the switching speed and thereby to reduce the energy loss of a p–n junction diode. The reverse recovery time decreased significantly but other electrical deterioration such as leakage current and on-stage voltage drop due to the electron irradiation was...
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Published in | Materials chemistry and physics Vol. 84; no. 1; pp. 187 - 191 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
15.03.2004
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Subjects | |
Online Access | Get full text |
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Summary: | Electron irradiation was performed to enhance the switching speed and thereby to reduce the energy loss of a p–n junction diode. The reverse recovery time decreased significantly but other electrical deterioration such as leakage current and on-stage voltage drop due to the electron irradiation was found not to be much. Also the defect distribution and the type of the electron irradiation-induced defects are discussed based on the deep level transient spectroscopy (DLTS) analysis results and the secondary ion mass spectrometry (SIMS) depth profiles of the silicon substrate. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 0254-0584 1879-3312 |
DOI: | 10.1016/j.matchemphys.2003.11.030 |