Strong second-harmonic generation in silicon nitride films

• Published in: Applied physics letters Vol. 100; no. 16; pp. 161902 - 161902-4
• Main Authors: Ning, Tingyin, Pietarinen, Henna, Hyvärinen, Outi, Simonen, Janne, Genty, Goëry, Kauranen, Martti
• Format: Journal Article
• Language: English
• Published: American Institute of Physics 16.04.2012

We observe strong second-harmonic generation from silicon nitride films prepared on fused silica substrates by plasma enhanced chemical vapor deposition. The components of the second-order nonlinear optical susceptibility tensor of the films are calibrated against quartz crystal. The dominant compon...