Radio-frequency magnetron sputter-deposited barium hexaferrite films on Pt-coated Si substrates suitable for microwave applications

Hexagonal barium ferrite films were deposited on Si (1 1 1) substrates by radio-frequency magnetron sputter deposition. The films exhibited strong c-axis perpendicular orientation benefiting from a Pt buffer layer. The results include measurements of crystallographic structure, magnetic domain struc...

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Bibliographic Details
Published inScripta materialia Vol. 63; no. 5; pp. 492 - 495
Main Authors Zhang, L., Su, X.D., Chen, Y., Li, Q.F., Harris, V.G.
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 01.09.2010
Subjects
Barium compounds
Barium ferrite
Barium hexaferrite
Crystal structure
Deposition
Ferrites
Magnetic domains
Microwave
Microwaves
Platinum
RF magnetron sputtering
Si substrate
Silicon substrates
RF magnetron sputtering
Microwave
Si substrate
Barium ferrite
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Summary:Hexagonal barium ferrite films were deposited on Si (1 1 1) substrates by radio-frequency magnetron sputter deposition. The films exhibited strong c-axis perpendicular orientation benefiting from a Pt buffer layer. The results include measurements of crystallographic structure, magnetic domain structure, and magnetic and microwave properties for barium hexaferrite films with different thicknesses of Pt underlayers, revealing ferromagnetic resonance linewidths, Δ H = 400–600 Oe at 40–60 GHz. These results provide a viable pathway to realizing miniaturized microwave devices integrated with semiconductor device platforms.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:1359-6462
1872-8456
DOI:10.1016/j.scriptamat.2010.05.013