Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications
A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (Q=130 000) and high maximum drive level (P= 0.12 mW at the hysteresis limit) is demonstrated. The prototype resonator is fabricated of single-crystal silicon by reactive ion etching of a silicon-on-insulato...
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| Published in | IEEE electron device letters Vol. 25; no. 4; pp. 173 - 175 |
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| Main Authors | , , , , |
| Format | Journal Article |
| Language | English |
| Published |
New York
IEEE
01.04.2004
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subjects | |
| Online Access | Get full text |
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| Abstract | A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (Q=130 000) and high maximum drive level (P= 0.12 mW at the hysteresis limit) is demonstrated. The prototype resonator is fabricated of single-crystal silicon by reactive ion etching of a silicon-on-insulator wafer. A demonstration oscillator based on the new resonator shows single-sideband phase noise of -138 dBc/Hz at 1 kHz offset from the carrier. |
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| AbstractList | A micromechanical 13.1-MHz bulk acoustic mode silicon resonator having a high quality factor (Q=130 000) and high maximum drive level (P= 0.12 mW at the hysteresis limit) is demonstrated. The prototype resonator is fabricated of single-crystal silicon by reactive ion etching of a silicon-on-insulator wafer. A demonstration oscillator based on the new resonator shows single-sideband phase noise of -138 dBc/Hz at 1 kHz offset from the carrier. |
| Author | Seppa, H. Kaajakari, V. Mattila, T. Oja, A. Kiihamaki, J. |
| Author_xml | – sequence: 1 givenname: V. surname: Kaajakari fullname: Kaajakari, V. organization: VTT Inf. Technol., Espoo, Finland – sequence: 2 givenname: T. surname: Mattila fullname: Mattila, T. organization: VTT Inf. Technol., Espoo, Finland – sequence: 3 givenname: A. surname: Oja fullname: Oja, A. organization: VTT Inf. Technol., Espoo, Finland – sequence: 4 givenname: J. surname: Kiihamaki fullname: Kiihamaki, J. organization: VTT Inf. Technol., Espoo, Finland – sequence: 5 givenname: H. surname: Seppa fullname: Seppa, H. organization: VTT Inf. Technol., Espoo, Finland |
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| Cites_doi | 10.1117/12.425337 10.1109/SENSOR.2003.1217080 10.1109/IEDM.2000.904363 10.1109/58.775646 10.1016/S0924-4247(02)00204-2 10.1002/mmce.1039 10.1109/22.780400 |
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| SubjectTerms | Acoustic noise Devices Etching Hysteresis Microcavities Micromechanical devices Oscillators Phase noise Q factor Quality factor Reactive ion etching Resonators Scanning electron microscopy Shape Silicon Silicon on insulator technology Single crystals |
| Title | Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications |
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