Multi-component low and high entropy metallic coatings synthesized by pulsed magnetron sputtering

• Published in: Surface & coatings technology Vol. 446; p. 128802
• Main Authors: Strzelecki, G.W., Nowakowska-Langier, K., Mulewska, K., Zieliński, M., Kosińska, A., Okrasa, S., Wilczopolska, M., Chodun, R., Wicher, B., Mirowski, R., Zdunek, K.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 25.09.2022
• Subjects: Frequency modulation; High entropy alloys; Nanohardness; Pulsed magnetron sputtering; Pulsed plasma; Pulsed plasma; Nanohardness; High entropy alloys; Frequency modulation; Pulsed magnetron sputtering
• ISSN: 0257-8972; 1879-3347; 1879-3347
• DOI: 10.1016/j.surfcoat.2022.128802

This paper presents the findings of the synthesis of multicomponent (Al, W, Ni, Ti, Nb) alloy coatings from mosaic targets. For the study, a pulsed magnetron sputtering method was employed under different plasma generation conditions: modulation frequency (10 Hz and 1000 Hz), and power (600 W and 1000 W). The processes achieved two types of alloy coatings, high entropy and classical alloys. After the deposition processes, scanning electron microscopy, X-ray diffraction, and energy-dispersive X-ray spectroscopy techniques were employed to find the morphology, thickness, and chemical and phase compositions of the coatings. Nanohardness and its related parameters, namely H3/Er2, H/E, and 1/Er2H ratios, were measured. An annealing treatment was performed to estimate the stability range for the selected coatings. The results indicated the formation of as-deposited coatings exhibiting an amorphous structure as a single-phase solid solution. The process parameters had an influence on the resulting morphology—a dense and homogenous as well as a columnar morphology, was obtained. The study compared the properties of high-entropy alloy (HEA) coatings and classical alloy coatings concerning their structure and chemical and phase composition. It was found that the change of frequency modulation and the post-annealing process contributed to the increase in the hardness of the material in the case of HEA coatings. •Successful pulsed magnetron sputtering synthesis of high entropy alloy layers•Sample morphology dependence on synthesis parameters•Significant increases in single-phase thermal stability•Marked increase in nanohardness after annealing