Fabrication and photoluminescence characteristics of nonuniform Yb-Er codoped films

• Published in: Journal of rare earths Vol. 26; no. 1; pp. 31 - 34
• Main Author: 李成仁 雷明凯 李淑凤 刘玉凤 宋昌烈
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 2008; College of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029, China; School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China; School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China%School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China%College of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029, China%School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China
• Subjects: asymmetry targets; photoluminescence spectra; rare earths; the medium frequency magnetron sputtering system; Yb-Er codoped nonuniform films; 光致发光材料; 共掺杂薄膜; 稀土元素; the medium frequency magnetron sputtering system; Yb-Er codoped nonuniform films; photoluminescence spectra; asymmetry targets; rare earths; rate earths
• ISSN: 1002-0721; 2509-4963
• DOI: 10.1016/S1002-0721(08)60031-9

The nonuniform Yb-Er Codoped Al2O3 films were prepared on SiO2/Si substrates using a medium frequency magnetron sputtering system. Two asymmetry targets in the system were introduced to realize the nonuniform dopant. Some curves of Photoluminescence （PL） peak intensity were obtained by adjusting the deposition parameters, such as, the pillar number of erbium and ytterbium in the mixed target and the distance between a sample table and targets. Typically, the curve of PL peak intensity against the offset distance was approximately linear. The ratio of the PL intensity at the two ends of the same sample was 12.6 and the slope was 71.83/mm when the pillar numbers of the erbium and ytterbium in the mixed target are 5 and 60, respectively, and the distance between targets and the sample table is 2.9 cm.