Ion projection direct structuring for patterning of magnetic media

• Published in: IEEE transactions on magnetics Vol. 38; no. 5; pp. 1952 - 1954
• Main Authors: Dietzel, A., Berger, R., Grimm, H., Bruenger, W.H., Dzionk, C., Letzkus, F., Springer, R., Loeschner, H., Platzgummer, E., Stengl, G., Bandic, Z.Z., Terris, B.D.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: New York, NY IEEE 01.09.2002; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Anisotropic magnetoresistance; Applied sciences; Electronics; Exact sciences and technology; Glass; Lithography; Magnetic and optical mass memories; Magnetic heads; Magnetism; Manufacturing processes; Nonhomogeneous media; Other magnetic recording and storage devices (including tapes, disks, and drums); Rough surfaces; Semiconductor films; Servomechanisms; Storage and reproduction of information; Surface roughness; Patterning; stencil masks; Perpendicular anisotropy; Lithography; Multiple layer; ion projection structuring patterned magnetic storage media; Co-Pt multilayers; Experimental study; Cobalt; Magnetic thin films; Magnetic force microscopy; Thin film; Magnetic material; Platinum; Magnetic anisotropy; Masking; Recording material; Manufacturing; Hard disk
• ISSN: 0018-9464; 1941-0069
• DOI: 10.1109/TMAG.2002.802846

Ion projection facilitates a direct structuring, which is an attractive potential manufacturing process for patterned storage media. An advantage to this method is that the media roughness remains unchanged. The feasibility of ion projection direct structuring for processing full disk surfaces was investigated using a next generation lithography projector. Co-Pt multilayer films with strong perpendicular anisotropy were deposited on 1-in glass disks as used in the IBM microdrive and on Si substrates. Concentric tracks including data, as well as head positioning servo structures, were patterned in a single exposure step with 45 keV He/sup +/ at a 4 /spl times/ demagnification. In a second experiment, sub-100-nm magnetic islands were produced using projection at 8.7 /spl times/ demagnification and visualized by magnetic force microscopy.